SiC MEMS Pressure Sensors: Technology, Applications and Markets

Silicon carbide (SiC) has been used for many conventional applications that require mechanical and chemical stability at high temperatures. Mechanical stability is defined as the ability of a particular material to preserve its mechanical properties – elasticity, fracture toughness, hardness – at temperatures below and above room temperature. Chemical stability is similarly defined as the ability of a particular material to preserve its composition at temperatures below and above room temperature. For high temperature applications, mechanical properties tend to deteriorate and chemical stability is compromised as corrosion processes occur.